This instruction covers the set-up and safe use of the Filmetrics F40-UV thin film measurement system.  This machine is a thin film measurement system that uses an ultraviolet light source and is capable of measuring a vertical film ranging between 4nm and 25µm. A Filmetrics F40-UV training video is also available. As with any tool in the BNC clean room, you must schedule time on the tool through iLab before use.

1.    SAFETY REQUIREMENTS

a. Safety glasses must be worn whenever in the clean room, except when using a microscope or when wearing protective goggles.

2.    EQUIPMENT

a. Filmetrics F10-RT

i. F10-RT tool, model 205-0863, S/N 18D021

ii. Sample Hold Down – F10 – RT (used to keep flexible samples flat)

iii. Fused Silica Reflectance Standard

iv. Silicon Reflectance Standard

v. BK7 Reflectance Standard

vi. Dark Standard

vii. Hardcoat Thickness (4.3509um, S/N 062618-01)

3.    TOOL CONFIGURATION 

4.    CYCLE OF OPERATION

a.        Verify the light source and F10-RT power indicator lamps on the base unit are lit as shown in Figure 1.

b.        Verify the computer (grey box mounted on back of monitor shown in Figure 2) and monitor are powered on.
             Refer to Section 6 for the startup procedure.

c.        Open the FILMeasure software if it is not already running. The FILMeasure will have a window with 2 tabs at

              the top; Measure and History. The Measure tab is for measurements related data and the History tab is for

              reviewing the historical data.

d.        Accurate measurements with the F10-RT requires proper measurement set-up which will include

             selecting / editing the film stack, taking a baseline measurement and analyzing the measured spectrum.

BASELINE

e.        Verify the “Measurement” window is selected by left clicking on the “Measurement” tab

f.        Select the recipe from the dropdown window above “Edit Recipe” shown in Figure3.

g.        Click “OK”.

              NOTE: A baseline Warning may appear. A new baseline must be performed which will be indicated by the

              Baseline button flashing yellow

h.        Left click on the “Baseline…” button located on the right side of the window.

i.      Place your sample to be measured on the stage so the system can get a Reflectance value.

              NOTE: Sample films on silicon must be placed resist side down since the light cannot pass through the silicon.

              Metal can be placed facing up if it has been deposited on a glass plate/coupon

j.        Complete Step1 by left clicking on “Take Sample Reflectance.

k.       Select the appropriate standard as specified by the F10-RT tool, such as “Fused Silica (2-sided)” Reflectance

              Standard, from the clear storage case.

l.        Place the appropriate Reflectance Standard on the base so that the 2 locating pins are in the holes and you

             can read the vertical face of the reflectance standard identification tag (shown in Figure 3).

m.      Left click on “Take Reflectance Standard” button

n.       Remove the reflectance standard and return it to the storage case after the scan is complete.

o.       Left click on “Take Background”. The stage should not have any samples on it for this scan.

p.       Place the “Dark” standard on the stage

q.       Left click on the “Take Dark” button and wait for the scan to complete.

r.       Click on “Finish” after the scan is complete

s.       Return the “Dark” standard to the storage case.

t.       Place your sample to be measured on the stage.

              NOTE:

u.      Click on the “Measure” button and wait for the spectrum analysis to complete.

v.      The Measurement Results are displayed on the right side of the Measure window. Compare the measured
             value with the value listed on the sample compact (if specified). The measurement should be within the posted

              control limits. If not, contact Birck Staff for support.

              NOTE: “Goodness of fit” is how well the measured value matches the expected value; 1 is a perfect fit

MEASUREMENT

w.      The Baseline must be performed before proceeding.

x.      Place the sample on the center of the F10-RT stage. The area of interest must appear in the center of the
             “Live Video”

y.       Left click on the “Measure” button and wait for the scan to complete.

z.       The measurement status will be replaced with the thickness value. The Measurement results will also be
             displayed in the lower right area of the Measure window and will include the film thickness, goodness of fit
             (GoF) and Normalized FFT (Fast Fourier Transform) Intensity.

5.    SUPPLEMENTAL DATA (Edits and Saving Data)

a. Editing Recipes

i. Select the “Measure” tab and click on the “Edit Recipe” button.

1.     The upper left corner of the window gives these options; Open a saved recipe, Start a new recipe, Save the current settings, Save the current settings as a new recipe, Delete the current recipe

2.     Choose the desired Recipe Name from the dropdown menu in the upper left portion of the open
           window

ii.        Select the “Film Stack” tab to set the units, Layers, Nominal thickness and range

iii.        Select the “Analysis Options” tab to define the wavelength range to be analyzed and the smoothing function
(this system is not capable of using the Source data option)

iv.        Select the “Alarms” tab to define the Goodness of Fit (GoF), to activate the alarms and define the thickness
             limits

v.         The “Acquisition Settings” tab options should be left at the default settings 

b. Performance Specifications

i.        Wavelength Range is 380nm – 1050nm

ii.        Thickness Range is 15nm – 70mm (material dependent)

iii.      Minimum thickness to measure n and k is 100nm

iv.      Accuracy is greater of either 0.2% or 2nm (material dependent)

v.      Precision is 0.02nm based on SiO₂-on-Si

vi.      Stability is 0.05nm

vii.      Measurement Spot Size is 6mm diameter                                                  

6.    STARTUP and SHUTDOWN

a. Startup

i.        Verify the light source rocker switch is in the on position (top half flush with panel) and the lamp is illuminated.

ii.        Verify the rocker switch next to the power connector on the back of the F10-RT tool is in the “I” position and

             the green main power indicator on the front panel is illuminated

iii.        Turn on the computer (grey box mounted on back of monitor) by depressing the button shown in Figure2

iv.        Turn on the monitor by depressing the rightmost power button under the display screen

v.         Warmup wait time must be 5 minutes for films thicker than 250nm or 15 minutes for films thinner than 25nm
             or if measuring the refractive index.

vi.        Open the FILMeasure software located on the computer desktop

b. Shutdown

i.        Verify sample has been removed from the stage.

ii.        Close the software by clicking on the (red) “x” in the upper right corner of the monitor

iii.        Shutdown Windows by left clicking on the “Windows” icon in the lower right corner, select the power button
and select the shut down option

iv.        Turn off the monitor.