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iLab Name: T64000 Thermo Scientific DXR3xi Raman Imaging Microscope
iLab Kiosk:
 BRK Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location:
BRK 1273
Maximum Wafer Size: 


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Overview

General Description

Microscope-coupled triple monochromator with first two stages in double-subtractive configuration and LN2 cooled CCD detector

Specifications

Raman spectroscopy with exceptionally low (5cm-1) frequency reach, excitation wavelengths across visible spectrum

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 


Specifications

  • Excitation: 455 and 532 laser lines,
  • Raman mapping: fast 3D positioning stage with 100-nm step sizes in the X-Y direction and 200-nm in the Z direction
  • Light detection: EMCCD camera
  • Spectral resolution: 2 to 5 cm-1, depending on the spectral window
  • Bulk sample accessory for powders and liquids

Technology Overview

Raman spectroscopy is a method of measuring frequencies and strengths of molecular vibrations. These frequencies typically belong in the infrared area of electromagnetic spectrum, but Raman spectroscopy allows measuring them using visible of near-IR light. Vibrational spectra of molecules are used to identify different species or crystalline structures of solids.


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting

 



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