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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description


Estimated Fix Date and Comment

Responding Staff




iLab Name: Leica DCM8 Confocal Microscope
iLab Kiosk: BRK Characterization Core
FIC:
 Shared
Owner:
 Sean RinehartGuy Telesnicki
Location:
 Cleanroom - J Bay
Maximum Wafer Size: 


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Overview

General Description

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 

 


Sample Requirements and Preparation

 


Standard Operating Procedure


Questions & Troubleshooting

 



Process Library



References