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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Olympus Microscope
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100
Maximum Wafer Size: 

Overview

General Description

The Olympus BX-60 Microscope can be used for sample inspection in reflection mode. Image capture is obtained though an Insight (18.2 Color Mosaic) CCD camera and "Spot Advanced" software.

Specifications

  • Reflection Mode Light Source: 100Watt halogen
  • Cube Assemblies: Bright-Field (BF), Dark-Field (DF), and Differential Interference Contrast (DIC).
  • Objectives: 5X, 20X, 50X

Tool Overview





Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References


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