PVD E-Beam Evaporator - Glancing Angle Deposition (GLAD)

Issue Date and Description

9/27/21, Up

Estimated Fix Date and Comment

Responding StaffDave

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iLab NameC - PVD E-Beam Evaporator - Glancing Angle Deposition (GLAD)
iLab KioskBRK Evaporation Sputtering Core
FICAlexandra Boltasseva
OwnerDave Lubelski
LocationCleanroom - L Bay
Max. Wafer3"-75mm
Current SourcesAu, Ti, Al, Ni
Potential SourcesAu, Ti, Al, Ni

Overview

General Description

4-Pocket Electron Beam Evaporator

Specifications

Large capacity 25cc crucibles, water cooled stage,

  • Angle Can be Adjusted 180 Degrees.


Technology Overview

 No Organic/Polymers Allowed


Sample Requirements and Preparation



Standard Operating Procedure

Please Note: This instrument is billed per  use  based on a 4 hour block

Example : 1  user only uses the tool  per use.  When you vent the system and unload your sample that concludes your reservation .  

Example: If the usage is 10+ minutes past the initial 4 hour reservation, you will be billed for 2 uses


Questions & Troubleshooting



Process Library


References