Tube 07 General Oxidation

Owned by Wirth, Justin C
Last updated: May 02, 2024 by Hosler, Richard S
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
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Protemp Horizontal Furnace - Tube 07 - General Oxidation

iLab Name: C - Tube 07 General Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

Overview

 - Thermal Oxidation

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 07 - Wet / Dry Oxidation (For III/V Materials)

Process Temperatures:

  • Tube 07 - 1100°C maximum