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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status
: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusWIP - Installing
Issue Date and Description


Estimated Fix Date and Comment



iLab Name: Thermo Scientific DXR3xi Raman Imaging Microscope
iLab Kiosk:
 BRK Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location:
BRK 1273
Maximum Wafer Size: 

Overview

General Description


Specifications

  • Excitation: 455 and 532 laser lines,
  • Raman mapping: fast 3D positioning stage with 100-nm step sizes in the X-Y direction and 200-nm in the Z direction
  • Light detection: EMCCD camera
  • Spectral resolution: 2 to 5 cm-1, depending on the spectral window
  • Bulk sample accessory for powders and liquids

Technology Overview

Raman spectroscopy is a method of measuring frequencies and strengths of molecular vibrations. These frequencies typically belong in the infrared area of electromagnetic spectrum, but Raman spectroscopy allows measuring them using visible of near-IR light. Vibrational spectra of molecules are used to identify different species or crystalline structures of solids.


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library


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