Skip to end of metadata
Go to start of metadata

You are viewing an old version of this content. View the current version.

Compare with Current View Version History

Version 1 Next »



Location: Cleanroom GH Chase

Overview

General Description

Ozone generator supplying ozone to the Fiji ALD and Black Magic Systems.

This is an example of a tip

This is an example of a tool warning

Specifications

Range: 0-5000 sccm





References

Mini ODS 610-0113-01_B.pdf


  • No labels