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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Olympus Microscope
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100
Maximum Wafer Size: 

Overview

General Description

The Olympus BX-60 Microscope can be used for sample inspection in reflection mode. Image capture is obtained though an Insight (18.2 Color Mosaic) CCD camera and "Spot Advanced" software.

Specifications

  • Reflection Mode Light Source: 100Watt halogen
  • Cube Assemblies: Bright-Field (BF), Dark-Field (DF), and Differential Interference Contrast (DIC).
  • Objectives: 5X, 20X, 50X

Tool Overview

Nomenclature / Identification



Controls

*The above illustration shows the microscope with the U-RLBC mirror cube housing for the brightfield/darkfield vertical illuminator.  In the case of Birck's microscope, U-URBC is used and the cube selector knob is replaced by a turret.

*Not all controls are available on the Birck microscope.

Eye Piece

  1. Interpupillary distance adjustment
    1. While looking through the eyepieces, adjust for binocular vision until the left and right fields of view coincide completely.  You should see one clear image when properly adjusted, out of adjustment and you will see double images.
  2. Diopter Adjustment
    1. Looking through the right eyepiece (2) with your right eye, rotate the course and fine adjustment knobs to bring the specimen into focus.
    2. Looking through the left eyepiece with your left eye, turn the diopter adjustment ring (1) to focus on the specimen.
  3. Eye Shades
    1. Since you will be using safety glasses of some sort, use with the eye shades in their normal folded down position. This will prevent the eyeglasses from being scratched.

BF/DF Light Path Selection

  1. Select the cube according to the observation purpose (1).
    1. Bright Field
    2. Dark Field


Filters

Pushing or pulling filters will place them into or out of the observation path.

  2. Filter Slider

  3.  Analyzer Slider

  4. Polarizer Slider


Intensity Ratio Selector

Push or pull the intensity ratio selector to select the desired light path.

Light Path Selector SymbolIntensity RatioApplication
Pushed in100% for binocular eyepiecesObservation of dark specimens
Middle position20% for binocular eyepieces, 80% for TV/photographyObservation of bright specimens, photography, Tv observation
Pulled out100% for TV/photographyPhotography, TV observation

Field Iris



Aperture Iris



Revolving Nosepiece

The revolving nosepiece allows the user to easily swap objective lenses into the observation path.  Grasp the knurled ring and rotate the nosepiece clockwise or counterclockwise until you feel the detent snap into position.

If the objective is not located at a detent with objective installed, then the observation path will be blocked and the user will only see black.

Do not attempt to rotate the nosepiece by grasping the object lense assembly directly.  This can damage the objective lense.

Illumination Controls

  1. Light Intensity Adjustment Slider
  2. Light Intensity / Voltage Indicator
    1. For photomicrography the intensity should at approximately the level indicated by the camera symbol ()
    2. The numbers to the right indicate the approximate voltage of the light.
  3. Transmitted / Reflected light selector switch.

Focus Knob

  1. Course adjustment knob tension adjustment (1).
    1. Typically, the coarse adjustment knob tension is preadjusted for easy use.
    2. If adjusted, turning in the direction of the arrow will increase tension and vise versa.
    3. If the stage drops by itself when the knob is released, or the microscope quickly loses focus after adjustment the tension is set too low, rotate the ring in the direction of the arrow to correct.
  2. Coarse adjustment knob
    1. The larger knob is course stage adjustment and is used to quickly move the stage up and down for sample focusing.
  3. Fine adjustment knob
    1. The small knob farthest from the microscope base is the fine adjustment knob, and is used to move the stage vertically in small increments to facilitate fine focus of the sample.

XY Axis Knob

  1. Y axis translation knob is the top knob and rotation will cause the stage to translate toward and away from you when looking in the eyepiece.
  2. X axis translation knob is the bottom knob and rotation will cause the stage to translate left and right when looking in the eyepiece.
  3. Y axis lock (3) is used to lock the y axis, and only allow translation in the x direction.
General Observation Procedure for Reflected Mode Microscopy


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References


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