iLab Name: Olympus Microscope
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100
Maximum Wafer Size:
Overview
General Description
The Olympus BX-60 Microscope can be used for sample inspection in reflection mode. Image capture is obtained though an Insight (18.2 Color Mosaic) CCD camera and "Spot Advanced" software.
Specifications
- Reflection Mode Light Source: 100Watt halogen
- Cube Assemblies: Bright-Field (BF), Dark-Field (DF), and Differential Interference Contrast (DIC).
- Objectives: 5X, 20X, 50X
Tool Overview
Nomenclature / Identification | |
Controls | |
*The above illustration shows the microscope with the U-RLBC mirror cube housing for the brightfield/darkfield vertical illuminator. In the case of Birck's microscope, U-URBC is used and the cube selector knob is replaced by a turret. *Not all controls are available on the Birck microscope. | |
Illumination Controls
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Light Path Selection
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Filters Pushing or pulling filters will place them into or out of the observation path. 2. Filter Slider 3. Analyzer Slider 4. Polarizer Slider | |
Revolving Nosepiece The revolving nosepiece allows the user to easily swap objective lenses into the observation path. Grasp the knurled ring and rotate the nosepiece clockwise or counterclockwise until you feel the detent snap into position. If the objective is not located at a detent with objective installed, then the observation path will be blocked and the user will only see black. Do not attempt to rotate the nosepiece by grasping the object lense assembly directly. This can damage the objective lense. | |
Eye Piece
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Focus Knob | |
XY Axis Knob | |
Field Iris | |
Aperture Iris | |
General Observation Procedure for Reflected Mode Microscopy | |
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library