iLab Name: Blue M Furnace
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Dan Hosler
Location: Cleanroom - P Bay
Maximum Wafer Size: 2"/50 mm

Overview

General Description

A table-top general purpose furnacefor inert and forming gas ambient conditions. Ramps to 1100C.

Specifications

• Four process gases, N₂, Ar, O₂, and Forming Gas.
• Capable of temperatures up to 1100°C (single temperature zone)
• Samples lay horizontally on a quartz plate boat.
• The quartz tube is 3" in diameter.
  
  

Sample Requirements and Preparation

If possible, samples should be Piranha cleaned for 10 minutes. If this is not possible due to material incompatibility, a TAI Solvent clean followed by a mandatory DI water rinse step is permissible.

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References