CrossLab Name: Alpha-Step
FIC: Shared
Owner: Sean Rinehart
Location: Cleanroom - Bay L
Maximum Wafer Size: 8"/200 mm
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Overview
General Description
The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.
Specifications
Accommodates up to 150mm (6") substrate and 21mm (0.83") thick. Measurement of vertical features ranging from 100A to approximately 2mm. The horizontal resolution limited by the stylus radius.
Sample Requirements and Preparation
Standard Operating Procedure
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Questions & Troubleshooting
Process Library
References