These tools measure the surface profile on a sample. There are both contact and non-contact profilometers.

  • KLA-Tencor Alpha-Step IQ Surface Profiler – This stylus based system is a contact profiler which measures the differences in the surface topography
  • Bruker Optical 3D Profilometer – A 3-dimensional non-contact optical profiler which utilizes white light interferometry to analyze the film surface.
  • KLA-Tencor P7 Profilometer – A stylus profiler system capable of measuring step height, roughness and waviness of a surface of interest.

Staff Contact: Ron Reger