Overview

These tools measure the surface profile on a sample. There are both contact and non-contact profilometers.

• KLA-Tencor Alpha-Step IQ Surface Profiler – This stylus based system is a contact profiler which measures the differences in the surface topography
• Bruker Optical 3D Profilometer – A 3-dimensional non-contact optical profiler which utilizes white light interferometry to analyze the film surface.
• KLA-Tencor P7 Profilometer – A stylus profiler system capable of measuring step height, roughness and waviness of a surface of interest.

Staff Contact: Ron Reger

• P-7 Profilometer
• Alpha-Step
  • Alpha-Step IQ Profiler - Standard Operating Procedure
• KLA-Tencor P-10 Profilometer
• Bruker Optical Profilometer