CrossLab Name: Blue M Furnace
FIC: Shared
Owner: Dan Hosler
Location: Cleanroom - P Bay
Maximum Wafer Size: 2"/50 mm
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Overview
General Description
A table-top general purpose oven for inert and forming gas ambient conditions. Ramps to 1100C.
Specifications
- Four process gases, N2, Ar, O2, and Forming Gas.
- Capable of temperatures up to 1100°C (single temperature zone)
- Samples lay horizontally on a quartz plate boat.
- The quartz tube is 3" in diameter.
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References