CrossLab Name: Alpha-Step
FIC: Shared
Owner: Sean Rinehart
Location: Cleanroom - Bay L
Maximum Wafer Size: 8"/200 mm
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Overview
General Description
The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.
Specifications
Accommodates up to 150mm (6") substrate and 21mm (0.83") thick. Measurement of vertical features ranging from 100 nm to approximately 2mm. Lateral feature detection is limited by the 5 um stylus radius.
Sample Requirements and Preparation
No real requirements, but keep in mind that flexible substrates may experience slight deformation under the 20 mg of force applied by the stylus tip.
Standard Operating Procedure
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Questions & Troubleshooting
Process Library
References