CrossLab Name: Alpha-Step
FIC: Shared
Owner: Sean Rinehart
Location: Cleanroom - Bay L
Maximum Wafer Size: 8"/200 mm
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Overview
General Description
The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.
Specifications
Accommodates up to 150mm (6") substrate and 21mm (0.83") thick. Measurement of vertical features ranging from 100 nm to approximately 2mm. Lateral feature detection is limited by the 5 um stylus radius.
Sample Requirements and Preparation
Standard Operating Procedure
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Questions & Troubleshooting
Process Library
References