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iLab Name: Carbon Nanotube PECVD
FIC:
Tim Fisher
Owner:
Dave Lubelski
Location:
brk2283
Maximum Wafer Size: 
2"


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Overview

General Description

Seki Techtron Diamond PECVD modified to grow carbon nanotubes.

Specifications

Limited access, see PI.

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library


References