iLab Name: Kratos AXIS Ultra DLD Imaging X-ray Photoelectron Spectrometer (XPS)
iLab CoreKiosk: BRK Metrology Core
FIC:
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size: 

Overview

General Description

Imaging X-ray Photoelectron Spectroscopy (XPS) provides information about the element and chemical composition of a substrate with a lateral resolution of 5 μm. The technique can analyze any vacuum-compatible substrate. The AXIS ULTRA DLD incorporates quantitative, real-time parallel XPS imaging with high spatial resolution spectroscopy.

Specifications

The technique can analyze any vacuum-compatible substrate.

• A Kratos charge neutralization system allows to work with non-conducting samples.
• Magnetic immersion lens for efficient  photoelectron collection.
• Spherical mirror analyzers  for high resolution (over spectrometer-sample resolution is <0.35 eV).
• Monochromized Al and Ag anodes minimize a sample radioactive damage.
• Concentric hemispherical analyzers combined with a DLD detector for real time XPS imaging.
• Fast load lock with cryo/heating options, which can used for biological and organic samples.
• A catalytic cell to facilitate substrate treatment and preparation (6 bar, 1000).
• A glove box attached directly to the instrument to load/prepare a moisture– or air–sensitive samples.
• A corronene gun for non-destructive depth profiling.

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References