iLab Name: Olympus Microscope
iLab CoreKiosk: BRK Characterization Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100
Maximum Wafer Size: 

Overview

General Description

The Olympus BX-60 Microscope can be used for sample inspection in reflection mode. Image capture is obtained though an Insight (18.2 Color Mosaic) CCD camera and "Spot Advanced" software.

Specifications

• Reflection Mode Light Source: 100Watt halogen
• Cube Assemblies: Bright-Field (BF), Dark-Field (DF), and Differential Interference Contrast (DIC).
• Objectives: 5X, 20X, 50X

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References