iLab Name: Olympus Microscope
iLab Core: Characterization Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100
Maximum Wafer Size:

Overview

General Description

The Olympus BX-60 Microscope can be used for sample inspection in reflection mode. Image capture is obtained though an Insight (18.2 Color Mosaic) CCD camera and "Spot Advanced" software.

Specifications

Reflection Mode Light Source: 100Watt halogen
Cube Assemblies: Bright-Field (BF), Dark-Field (DF), and Differential Interference Contrast (DIC).
Objectives: 5X, 20X, 50X

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting