iLab Name: Blue M Furnace
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: WIl Arnett
Location: Cleanroom - R Bay
Maximum Wafer Size: 2"/50 mm
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Overview
General Description
A table-top general purpose furnacefor inert and forming gas ambient conditions. Ramps to 1100C.
Specifications
- Four process gases, N2, Ar, O2, and Forming Gas.
- Capable of temperatures up to 1100°C (single temperature zone)
- Samples lay horizontally on a quartz plate boat.
- The quartz tube is 3" in diameter.
Technology
Overview - Remove if multiple tools use the same technology/processOverview
Sample Requirements and Preparation
If possible, samples should be Piranha cleaned for 10 minutes. If this is not possible due to material incompatibility, a TAI Solvent clean followed by a mandatory DI water rinse step is permissible.
Standard Operating Procedure
View file name Blue M Furnace SOP.pdf height 250 View file name Clean-Chuck-Instructions.pdf height 250
Questions & Troubleshooting
Process Library
References