iLab Name: T64000 Raman
iLab Core: BRK Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size:
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Overview
General Description
Microscope-coupled triple monochromator with first two stages in double-subtractive configuration and LN2 cooled CCD detector
Specifications
Raman spectroscopy with exceptionally low (5cm-1) frequency reach, excitation wavelengths across visible spectrum
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References