iLab Name: T64000 Raman
iLab Core: Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size: 

Overview

General Description

Microscope-coupled triple monochromator with first two stages in double-subtractive configuration and LN2 cooled CCD detector

Specifications

Raman spectroscopy with exceptionally low (5cm-1) frequency reach, excitation wavelengths across visible spectrum

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References