iLab Name: 2031 NanoChemistry Hoods
iLab Kiosk:
FIC: N/A
Owner: Steve Jurss
Location: BRK 2031
Maximum Wafer Size: N/A
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Overview
General Description
Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References