iLab Name: Blue M Furnace
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: WIl Arnett
Location: Cleanroom - R Bay
Maximum Wafer Size: 2"/50 mm

Overview

General Description

A table-top general purpose furnacefor inert and forming gas ambient conditions. Ramps to 1100C.

Specifications

• Four process gases, N₂, Ar, O₂, and Forming Gas.
• Capable of temperatures up to 1100°C (single temperature zone)
• Samples lay horizontally on a quartz plate boat.
• The quartz tube is 3" in diameter.

Materials Compatibility

Sample Requirements and Preparation

If possible, samples should be Piranha cleaned for 10 minutes. If this is not possible due to material incompatibility, a TAI Solvent clean followed by a mandatory DI water rinse step is permissible.

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References