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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.
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iLab Name: Carbon Nanotube PECVD
iLab Kiosk:
FIC: Tim Fisher
Owner: Dave Lubelski
Location: BRK 2283
Maximum Wafer Size: 2"/50 mm
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Overview
General Description
Seki Techtron Diamond PECVD modified to grow carbon nanotubes.
Specifications
Limited access, see PI.
Technology Overview
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References