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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description


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iLab Name: Thermo Scientific Apreo S
iLab Kiosk: Purdue Electron Microscopy Facility
FIC: Rosa Diaz

Owner:
Xingtao Liu
Location:
Cleanroom - N Bay
Maximum Wafer Size: 
6"/150 mm


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Overview

General Description


Specifications

Electron optics

  • High-resolution field emission SEM column with: 
    • High-stability Schottky field emission gun to provide stable high-resolution analytical currents 
    • Compound final lens: a combined electrostatic, field-free magnetic and immersion magnetic objective lens* 
    • 60° objective lens geometry: allows tilting larger samples 
  • Automated heated apertures to ensure cleanliness and touch free aperture changes 
  • Through-the-lens differential pumping for low vacuum* reduces beam skirting for the most accurate analysis and highest resolution • Beam deceleration with stage bias from -4000 V to +600 V 
  • Continuous beam current control and optimized aperture angle 
  • Double stage scanning deflection 
  • Easy gun installation and maintenance – auto bake-out, auto start, no mechanical alignments 
  • Guaranteed minimal source lifetime: 24 months

Electron Beam Resolution at optimum WD

  • 30 kV - 0.8 nm
  • 15 kV - 0.7 nm
  • 1 kV - 1.0 nm

Electron beam parameter space

  • Compound Final lens
  • Beam current range: 1 pA to 400 nA 
  • Accelerating voltage range: 200 V–30 kV 
  • Landing energy range: 20 eV–30 keV 
  • Max. Horizontal Field Width: 3.0 mm at 10 mm WD (corresponds to 29x minimum magnification).

Stage and sample

  • Type - Eucentric goniometer stage, 5-axes motorized 
  • XY - 110 × 110 mm 
  • Repeatability - < 3.0 μm (@ 0° tilt) 
  • Motorized Z - 65 mm 
  • Rotation - n × 360° Tilt -15° / +90° 
  • Max. sample height - Clearance 85 mm to eucentric point 
  • Max. sample weight - 500 g in any stage position (up to 2 kg at 0° tilt) 
  • Max. sample size - 122 mm diameter with full X,Y, rotation (larger samples possible with limited stage travel or rotation)


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library


References