Thermo Scientific Apreo SEM
- Wirth, Justin C
- alcarazr (Unlicensed)
- oerturk
2024-12-20 to 2025-01-02: Reduced Holiday Operations
Dear Birck Research Community,
The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.
Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.
| Status | UP |
Issue Date and Description | 2/8/2020 Contamination Issue |
Estimated Fix Date and Comment | 2/13/2020 Pole piece has been properly cleaned |
| Responding Staff | Alejandro Alcaraz |
iLab Name: Thermo Scientific Apreo S
iLab Kiosk: Purdue Electron Microscopy Facility
FIC: Rosa Diaz
Owner: Alejandro Ramirez
Location: Cleanroom - N Bay
Maximum Wafer Size: 6"/150 mm
Overview
General Description
The most versatile high-performance SEM. The Thermo Scientific™ Apreo scanning electron microscope's (SEM) revolutionary compound lens design combines electrostatic and magnetic immersion technology to yield unprecedented resolution and signal selection. The Apreo SEM benefits from the unique in-lens backscatter detection, which provides excellent materials contrast, even at tilt, short working distance, or on sensitive samples.
Sample Requirements and Preparation
Samples should be conductive to maximize sample imaging. With conductive samples features of 10nm can be observed with 5kV. Nonconductive samples can still be imaged, but not small features, limiting smallest resolutions to hundreds of nm, even microns, at low beam voltages (1-5kV). Non-conductive samples can become conductive if they are coated with Carbon, Au-Pd, or Silver paint.
Standard Operating Procedure
Questions & Troubleshooting
Any questions? Please write them down here or contact the Electron Microscopy Staff
References
- Inkson, B. J. "Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) for materials characterization." Materials characterization using nondestructive evaluation (NDE) methods. Woodhead Publishing, 2016. 17-43.
- Sharma, Surender Kumar, et al., eds. Handbook of Materials Characterization. Springer International Publishing, 2018.
- Reimer, Ludwig. Scanning electron microscopy: physics of image formation and microanalysis. Vol. 45. Springer, 2013.
2024-12-20 to 2025-01-02: Reduced Holiday Operations
Dear Birck Research Community,
The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.
Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.
| Status | UP |
Issue Date and Description | 2/8/2020 Contamination Issue |
Estimated Fix Date and Comment | 2/13/2020 Pole piece has been properly cleaned |
| Responding Staff | Alejandro Alcaraz |
iLab Name: Thermo Scientific Apreo S
iLab Kiosk: Purdue Electron Microscopy Facility
FIC: Rosa Diaz
Owner: Alejandro Ramirez
Location: Cleanroom - N Bay
Maximum Wafer Size: 6"/150 mm
Overview
General Description
The most versatile high-performance SEM. The Thermo Scientific™ Apreo scanning electron microscope's (SEM) revolutionary compound lens design combines electrostatic and magnetic immersion technology to yield unprecedented resolution and signal selection. The Apreo SEM benefits from the unique in-lens backscatter detection, which provides excellent materials contrast, even at tilt, short working distance, or on sensitive samples.
Sample Requirements and Preparation
Samples should be conductive to maximize sample imaging. With conductive samples features of 10nm can be observed with 5kV. Nonconductive samples can still be imaged, but not small features, limiting smallest resolutions to hundreds of nm, even microns, at low beam voltages (1-5kV). Non-conductive samples can become conductive if they are coated with Carbon, Au-Pd, or Silver paint.
Standard Operating Procedure
Questions & Troubleshooting
Any questions? Please write them down here or contact the Electron Microscopy Staff
References
- Inkson, B. J. "Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) for materials characterization." Materials characterization using nondestructive evaluation (NDE) methods. Woodhead Publishing, 2016. 17-43.
- Sharma, Surender Kumar, et al., eds. Handbook of Materials Characterization. Springer International Publishing, 2018.
- Reimer, Ludwig. Scanning electron microscopy: physics of image formation and microanalysis. Vol. 45. Springer, 2013.