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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description


Estimated Fix Date and Comment

Responding Staff

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iLab Name: Thermo Scientific Helios G4 UX Dual BeamImage Added
iLab Kiosk: Purdue Electron Microscopy Facility
FIC: Rosa Diaz
Owner: Xingtao Liu
Location: BRK 1237
Maximum Wafer Size: 2"/50 mm


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Overview

General Description

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References