1.2.1 Electron optics

• Elstar extreme high-resolution field emission SEM column with:

– Immersion magnetic objective lens

– High-stability Schottky field emission gun to provide stable high-resolution analytical currents

– UC+ monochromator technology

• 60 degree dual objective lens with pole piece protection allows tilting larger samples

• Automated heated apertures to ensure cleanliness and touch free aperture exchange

• Electrostatic scanning for higher deflection linearity and speed

• Thermo Scientific Constant Power™ Lens Technology for higher thermal stability

• Integrated Fast Beam Blanker*

• Beam deceleration with stage bias from 0 V to -4 kV

• Minimum source lifetime: 12 months

1.2.2 Electron beam resolution

• At optimum WD: – 0.6 nm at 30 kV STEM – 0.7 nm at 1 kV – 1.0 nm at 500 V (ICD)

• At coincident point: – 0.6 nm at 15 kV – 1.2 nm at 1 kV

1.2.3 Electron beam parameter space

• Electron beam current range: 0.8 pA to 100 nA

• Accelerating voltage range: 350 V – 30 kV • Landing energy range: 20 eV – 30 keV

• Maximum horizontal field width: 2.3 mm at 4 mm WD

1.2.4 Ion optics

Phoenix ion column with superior high current and low voltage performance

• Ion beam current range: 0.1 pA – 65 nA

• Accelerating voltage range: 500 V – 30 kV

• 2-stage differential pumping

• Time-of-flight (TOF) correction

• 15-position aperture strip

• Max. horizontal field width: 0.7 mm at beam coincidence point

• Minimum source lifetime: 1,000 hours

1.2.5 Ion beam resolution at coincident point

• 4.0 nm at 30 kV using preferred statistical method

• 2.5 nm at 30 kV using selective edge method

1.2.6 Detectors

• Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)

• Elstar in-column SE/BSE detector (ICD)

• Elstar in-column BSE detector (MD)

• Everhart-Thornley SE detector (ETD)

• IR camera for viewing sample/column

• High performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE)

• Sample navigation with in-chamber Nav-Cam Camera

• Retractable low voltage, high contrast directional solid-state backscatter electron detector (DBS)*

• Retractable STEM 3+ detector with BF/ DF/ HAADF segments*

• Integrated beam current measurement

1.2.7 Stage and sample

• High precision 5-axis motorized stage, with XYR axis Piezo driven:

• XY range: 150 mm • Z range: 10 mm • Rotation: 360° (endless)

• Tilt range: -10° to +60°

• XY repeatability: 1 μm

• Max sample height: Clearance 55 mm to eucentric point

• Max sample weight: 500 g (including sample holder)

• Max sample size: 150 mm with full rotation (larger samples possible with limited rotation)

• Compucentric rotation and tilt

1.2.8 Image processor

• Dwell time range from 25 ns – 25 ms/pixel

• Up to 6144 × 4096 pixels • File type: TIFF (8, 16, 24-bit), BMP o JPEG standard

• SmartSCAN Modes (256 frame average or integration, line integration and averaging, interlaced scanning) • DCFI (Drift Compensated Frame Integration)

1.2.9Accessories*

• Thermo Scientific MultiChem™: Pt, C and W deposition

• Thermo Scientific EasyLift™ for precise in situ sample manipulation

• Plasma cleaner

• Oxford Instruments X-Max Energy Dispersive Detector (EDS)