iLab Name: Kratos AXIS Ultra DLD Imaging X-ray Photoelectron Spectrometer (XPS)
iLab Kiosk: BRK Metrology Core
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size:  N/A

Overview

General Description

Imaging X-ray Photoelectron Spectroscopy (XPS) provides information about the element and chemical composition of a substrate with a lateral resolution of 5 μm. The technique can analyze any vacuum-compatible substrate. The Kratos AXIS ULTRA DLD incorporates quantitative, real-time parallel XPS imaging with high spatial resolution spectroscopy.

Specifications

The technique can analyze any vacuum-compatible substrate.

• A Kratos charge neutralization system allows to work with non-conducting samples.
• Magnetic immersion lens for efficient  photoelectron collection.
• Spherical mirror analyzers  for high resolution (over spectrometer-sample resolution is <0.35 eV).
• Monochromized Al and Ag anodes minimize a sample radioactive damage.
• Concentric hemispherical analyzers combined with a DLD detector for real time XPS imaging.
• Fast load lock with cryo/heating options, which can used for biological and organic samples.
• A catalytic cell to facilitate substrate treatment and preparation (6 bar, 1000).
• A glove box attached directly to the instrument to load/prepare a moisture– or air–sensitive samples.
• A corronene gun for non-destructive depth profiling.

Technology Overview

How to have your sample analyzed with XPS at the BNC Surface Analysis Facility

XPS data acquisition is performed by Dr. Dmitry Zemlyanov. No training is required to have samples analyzed by XPS, however an acquisition and data analysis fee will be accessed. In certain circumstance a user can be train to operate the XPS equipment alone without supervision and only be accessed the instrument acquisition fee. Please see “How to become an expert user in the Surface Analysis facility”.

The following steps should be followed to have your sample(s) analyzed by XPS:

1. If you’ve never used the XPS facility at Birck Nanotechnology Center, schedule a preliminary meeting Dr. Dmitry Zemlyanov (dzemlian@purdue.edu) is required. The meeting is essential for the proper evaluation of a project, time required to complete, sample handling/transportation, etc. Sample transportation is very critical to the quality and reliability of the XPS analysis therefore the user should discuss how to store and how to carry the sample(s) during the preliminary meeting.

2. Open iLab account (consult with your department Business Office how to do this).

Sample Requirements and Preparation

1. You will receive an immediate confirmation that your request has been successfully submitted.

2. You will receive (via e-mail) a date and time when samples should be delivered to the Birck Nanotechnology Center for analysis. You MUST confirm the date and time to ensure proper sample transfer. Date and/or time can be rescheduled by contacting Dr. Zemlyanov directly.

3. Bring your samples at the scheduled date and time to (BRK 1274 or BRK 1077).

4. Receive the data in the format specified in XPS service contract and collect your samples. Samples not collected within 2 weeks will be disposed.

Helpful details:

1. The best sample size is 10mm × 8mm × 1mm.

2. Fee for Purdue users is $35 per hour for XPS data acquisition. By a rough estimation, it takes 2-4 hours ($70 to $140) per acquisition point.

3. Preliminary data analysis and data interpretation can be performed by Dmitry Zemlyanov. The rate for the data analysis is $70 per hour for

Purdue users. It takes from 0.5 hour to 3 hours per sample/acquisition point depending on complexity and kind of analysis required.

4. Please do not hesitate to check the status of the work and request your data.

In any publications user must to acknowledge the Birck facility using the template below:
The XPS data was obtained at the Surface Analysis Facility of the Birck Nanotechnology Center, Purdue University.

If XPS data was analyzed by Dr. Zemlyanov, it implies acknowledgement and/or co-authorship based on intellectual contribution in any related publications.

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References