TEM specimen preparation system that creates high-quality thin specimens needed for advanced TEM imaging and analysis. It is ideal for both post-FIB processing and the enhancement of conventionally prepared specimens.
Works with ultra-low energy ion source (50eV) and a concentrated ion beam with a beam size small as 1 um
It allows specimens to be prepared without amorphization, impantation, or redeposition.
The ion beam can be targeted to a specific are of interest.
A secondary electron detector is used to image the ion-induced secondary electrons that are generated from the targeted area of the specimen.
System if fully automated: adjustable ion beam energies, milling angles, specimen rotation, and cryogenic specimen cooling parameters.
The SPI-Module line of modular sputter coaters and carbon coaters are optimized for gold coating and carbon coating for all SEM and EDS applications.