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Problem Reporting Guide
Problem Reporting Guide
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StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff




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iLab Name
iLab Kiosk


FIC


Owner


Location


Max. Wafer


Internal Page
Staff Page




Table of Content Zone
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Table of Contents
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Overview

General Description

Tip

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Warning

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Specifications

- 4 inch stage with motorized z-axis
- Two lenses with magnification of 20x- 200x
- Color monitor
- CMOS sensor
- Can do bright field, dark field and a variety of
others
- Can record images and measurements
- Easy to use

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library


References