2025-05-05 to 2025-05-23: Semi-Annual Facility Preventive Maintenance

Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	Down
Issue Date and Description	2/26/2025. Needs admin password to get into computer.
Estimated Fix Date and Comment	3/7/2025
Responding Staff	Bill Rowe

iLab Name	C - Keyence VHX-6000 Digital Microscope
iLab Kiosk
FIC
Owner
Location
Max. Wafer
Internal Page
Staff Page

Overview

General Description

This is an example of a tip

This is an example of a tool warning

Specifications

- 4 inch stage with motorized z-axis
- Two lenses with magnification of 20x- 200x
- Color monitor
- CMOS sensor
- Can do bright field, dark field and a variety of
others
- Can record images and measurements
- Easy to use

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

Keyence VHX-950F Digital Microscope

C - Keyence VHX-6000 Digital Microscope