Keyence VHX-950F Digital Microscope




Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status
: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff



iLab Name
iLab Kiosk


FIC


Owner


Location


Max. Wafer


Internal Page
Staff Page

Overview

General Description

This is an example of a tip

This is an example of a tool warning

Specifications

- 4 inch stage with motorized z-axis
- Two lenses with magnification of 20x- 200x
- Color monitor
- CMOS sensor
- Can do bright field, dark field and a variety of
others
- Can record images and measurements
- Easy to use

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library


References