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iLab Name: C - Cascade Tek TVO-2 Vacuum Oven
iLab Kiosk: BRK Lithography Core
FIC: Shared
Owner: Matthew Hayes
Location: Cleanroom - M Bay
Maximum Wafer Size: 12"/300 mm
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Overview
General Description
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Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
- Is it enough to bake PMMA at 75C for 30 min?
Process Library
1. PMMA Bake: bake at 75C for 30 min