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Plasma-Therm Apex SLR HDPCVD
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Overview
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General Description
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Specifications
Factory Support:
Paris Harvey - Field Service Engineer
- 727-687-7947 mobile
- paris.harvey@plasmatherm.com
- Paris did the initial tool commissioning and installation in August 2019. He was great to work with and had worked in manufacturing on these tools as well, so he knew it inside and out.
JJ Whitehead - Field Service Engineer
- 727-458-1960
- jonathan.whitehead@plasma-therm.com
Specifications
Lower Electrode Temperature Range
- 10 - 60°C
Chamber Leak Rate
Plasma Power Supply
- 600W 13.56MHz Bias Supply
- 2kW 2MHz ICP
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
View file name SOP-V14.pdf height 250 View file name FM - Recipe Writing - J.pdf height 250
Questions & Troubleshooting
Process Library