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Plasma-Therm Apex SLR ICP RIE Etcher
Plasma-Therm Apex SLR ICP RIE Etcher
Plasma-Therm Apex SLR HDPCVD
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Overview
General Description
Specifications
Factory Support:
Paris Harvey - Field Service Engineer
- 727-687-7947 mobile
- paris.harvey@plasmatherm.com
- Paris did the initial tool commissioning and installation in August 2019. He was great to work with and had worked in manufacturing on these tools as well, so he knew it inside and out.
JJ Whitehead - Field Service Engineer
- 727-458-1960
- jonathan.whitehead@plasma-therm.com
Plasma Power Supply
- 600W 13.56MHz Bias Supply
- 2kW 2MHz ICP
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References
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