Plasma-Therm Apex SLR ICP RIE Etcher
Status | Up |
Issue Date and Description | The new Matching Network has been installed and the tool is working properly. |
Estimated Fix Date and Comment |
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Responding Staff | Francis |
Plasma-Therm Apex SLR HDPCVD
iLab Name | |
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iLab Kiosk | |
FIC | Shared |
Owner | Francis Manfred |
Location | Cleanroom - K Bay |
Max. Wafer | 6" |
Internal Page |
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Staff Page |
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Overview
Type | Materials | Restricted Materials | Available Gases | Max RF Power | Wafer Size |
|---|---|---|---|---|---|
ICP RIE | Si, Oxides, III-IV's, Ti, Al, SiC,SiNx | Au, Ag, Pt, Cu | Ar, CHF3, CF4, SF6, Cl2, N2, O2, BCl3, H2 | 2000 ICP / 600 Platen | 6 inch (150 mm) SEMI Specification |
General Description
Specifications
Factory Support:
Paris Harvey - Field Service Engineer
727-687-7947 mobile
Paris did the initial tool commissioning and installation in August 2019. He was great to work with and had worked in manufacturing on these tools as well, so he knew it inside and out.
JJ Whitehead - Field Service Engineer
727-458-1960
Plasma Power Supply
600W 13.56MHz Bias Supply
2kW 2MHz ICP
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References
Comments
The disk space error has been fixed.
The disk space on the computer C:\ drive is low, and the software prompting this error does not let users start a process.