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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description


Estimated Fix Date and Comment

Responding Staff



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iLab Name

Nanoscribe Photonic Professional GT2

iLab Kiosk

BRK Lithography Core

FIC

David Cappelleri

Owner

Bill Rowe

Location

BRK 2100F

Max. Wafer

4"/100 mm

Info LinksInternal | Staff




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Overview

General Description

Tip

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Warning

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure

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Training video on 6/24/2021, (only available for Purdue users)


Questions & Troubleshooting




Process Library


References