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iLab Name: C - Olympus BX-60 Microscope (J Bay)
iLab CoreKiosk: Characterization BRK Metrology Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100 (J Bay)
Maximum Wafer Size:
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Overview
General Description
The Olympus BX-60 Microscope can be used for sample inspection in reflection mode. Image capture is obtained though an Insight (18.2 Color Mosaic) CCD camera and "Spot Advanced" software.
Specifications
Questions & Troubleshooting
Process Library
References
- Reflection Mode Light Source: 100Watt halogen
- Cube Assemblies: Bright-Field (BF), Dark-Field (DF), and Differential Interference Contrast (DIC).
- Objectives: 5X, 20X, 50X
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
- Stage Travel: 76 x 76 x 52 mm
Tool Overview
Nomenclature / Identification | |||||||||||||||||
Controls | |||||||||||||||||
*The above illustration shows the microscope with the U-RLBC mirror cube housing for the brightfield/darkfield vertical illuminator. In the case of Birck's microscope, U-URBC is used and the cube selector knob is replaced by a turret. *Not all controls are available on the Birck microscope. | |||||||||||||||||
Eye Piece
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BF/DF Light Path Selection
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Filters Pushing or pulling filters will place them into or out of the observation path. 2. Filter Slider 3. Analyzer Slider 4. Polarizer Slider | |||||||||||||||||
Intensity Ratio Selector Push or pull the intensity ratio selector to select the desired light path.
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Field Iris The field iris is used to restrict the diameter of the beam of light entering the objective and thus excludes stray light from the observation path improving image contrast. The diameter of the field iris should be adjusted for each objective power to the extent that is just circumscribes the field of view. The field iris diaphragm knob (2) and the field iris centering knob (3) are used to adjust the field iris size and position in relation to the observation path. | |||||||||||||||||
Aperture Iris The aperture iris diaphragm determines the numerical aperture of the illumination system. Matching the numerical aperture of the illumination system with that of the objective provides better image resolution and contrast, and also increases the depth of focus. The aperture iris diaphragm knob (2) and the aperture iris centering knob (3) are used to adjust the aperture iris size and position in relation to the observation path. | |||||||||||||||||
Revolving Nosepiece The revolving nosepiece allows the user to easily swap objective lenses into the observation path. Grasp the knurled ring and rotate the nosepiece clockwise or counterclockwise until you feel the detent snap into position. If the objective is not located at a detent with objective installed, then the observation path will be blocked and the user will only see black.
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Illumination Controls
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Focus Knob
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XY Axis Knob
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Standard Operating Procedure
General Observation Procedure for Reflected Mode Microscopy | |||||||||||||
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Set the cube selector turret to BF for bright field. | |||||||||||||
Disengage the filter slider (2), analyzer slider (3), and polarizer slider (4) from the light path. | |||||||||||||
Press the transmitted / reflected light selector switch (3) to select the reflected light mode. | |||||||||||||
Make sure light intensity preset button (1) is OFF. | |||||||||||||
Press the main switch to "I" (ON) and adjust the light intensity with the light intensity slider. | |||||||||||||
Using the coarse focus adjustment knob (1), move the stage to the lowest position. Place sample on the stage. Note: Be sure that the surface of the specimen to be observed is perpendicular to the optical axis of the microscope. | |||||||||||||
Turn the revolving nosepiece to engage the 5X objective. While looking through the eyepiece, use the coarse focus adjustment knob to raise the stage and bring the sample into focus. | |||||||||||||
Adjust interpupillary distance as necessary for clear binocular vision. | |||||||||||||
Looking only through the right eyepiece with your right eye, use the fine adjustment knob to bring the sample into final focus. | |||||||||||||
Looking only through the left eyepiece, use the diopter ring (1) to bring the left eyepiece into focus. This corrects the microscope observation paths for any differences between your left and right eye. You should now see a clear image through both lenses. | |||||||||||||
Adjust the field iris as necessary to obtain appropriate illumination for the sample.
Reflected light bright field observation - To obtain good image contrast, adjust the diameter of the illuminating beam in accordance with the objective in use. Using the field iris diaphragm knob (2) on the vertical illuminator, adjust the diaphragm so that the field of view is circumscribed by the field iris diaphragm in order to exclude stray light. Reflected light dark field observation - Always keep the field iris diaphragm knob (2) pushed in to leave the diaphragm open. | |||||||||||||
Adjust the aperture iris as necessary to obtain appropriate illumination for the sample.
Reflected light bright field observation - In general, a good image is obtained if the diaphragm is reduced down to 70-80% of the objective's numerical aperture. Reflected light dark field observation - Generally, you will always keep the aperture iris diaphragm knob (2) pushed in to leave the diaphragm open. Note: Depending on the specimen, an image with good contrast and little flare may sometimes be obtained by keeping the aperture iris diaphragm stopped down a little more. Please experiment with this to see if it works with the particular specimen. | |||||||||||||
Engage the filters suitable for your observation
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Photomicrography | |||||||||||||
This microscope is equipped with a photomicrography tube and camera for observation and photography using the attached PC. |
Frequently Asked Questions
- Question 1?
- Answer 1.