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Problem Reporting Guide
Problem Reporting Guide
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StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff




iLab Name: 2031 NanoChemistry Hoods
iLab Kiosk:
FIC: N/A
Owner: N/A Steve Jurss
Location: N/A BRK 2031
Maximum Wafer Size: N/A


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Overview

General Description

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 

 


Sample Requirements and Preparation

 


Standard Operating Procedure


Questions & Troubleshooting

 



Process Library

References