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iLab Name: T64000 Thermo Scientific DXR3xi Raman Imaging Microscope
iLab CoreKiosk: BRK Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size:
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Overview
General Description
Microscope-coupled triple monochromator with first two stages in double-subtractive configuration and LN2 cooled CCD detector
Specifications
Raman spectroscopy with exceptionally low (5cm-1) frequency reach, excitation wavelengths across visible spectrum
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Specifications
- Excitation: 455 and 532 laser lines,
- Raman mapping: fast 3D positioning stage with 100-nm step sizes in the X-Y direction and 200-nm in the Z direction
- Light detection: EMCCD camera
- Spectral resolution: 2 to 5 cm-1, depending on the spectral window
- Bulk sample accessory for powders and liquids
Technology Overview
Raman spectroscopy is a method of measuring frequencies and strengths of molecular vibrations. These frequencies typically belong in the infrared area of electromagnetic spectrum, but Raman spectroscopy allows measuring them using visible of near-IR light. Vibrational spectra of molecules are used to identify different species or crystalline structures of solids.
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library