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iLab Name: C - Nikon Eclipse L150 Microscope 1 (N Bay) & C - Nikon Eclipse L150 Microscope 2 (N Bay)
iLab Kiosk: BRK Metrology Core
FIC: Shared
Owner: Bill Rowe
Location: Cleanroom Bay N
Maximum Wafer Size:

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Overview

General Description

The Olympus BX-60 Nikon Eclipse L150 Industrial Microscope can be used for sample inspection in reflection mode. Image capture is obtained though an Insight (18.2 Color Mosaic) CCD camera and "Spot Advanced" softwarethrough a CCD camera.

Specifications

Reflection Mode Light Source: 100Watt 100 Watt halogen
Available observations:
- Reflected light brightfield
- Reflected light darkfield
- Reflected light Nomarski DIC
- Reflected light simplified polarized light
Objectives: 5X, 10X, 20X, 50X
Stage Travel: 105 x 100 x 52 mm

Tool Overview

Filters

ND Filter Knob - The ND filter is interlocked with the brightfield (BF) light path switching so it can be engaged or disengaged according to the mirror selector lever (1). The ND filter makes it possible to reduce the glare when darkfield (DF) is switched to brightfield (BF).

Filter Slots - Engage the optimum filter sliders for the purpose of observation in the two filter insertion slots (3). Be sure to engage from the left side. The first click position is the idle position and the second click engages the filter in the light path.

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Nomenclature / Identification

Controls

Eye Piece

Anchor

	eyepiece
	eyepiece

Interpupillary distance adjustment
1. While looking through the eyepieces with a sample in focus, adjust for binocular vision until the left and right fields of view coincide completely. You should see one clear image when properly adjusted, out of adjustment and you will see double images.
Diopter Adjustment
1. Turn the diopter adjustment rings on both eyepieces to align their engraved lines with the edge of the outer tub of the eyepiece. This is the standard position.
2. Focus on the sample with the 10X objective using bright-field.
3. Bring the 50X objective into the optical path and focus on the sample by turning the coarse/fine focus knobs.
4. Bring the 5x or 10x objective into the optical path and focus on the sample by turning the diopter ring on the right eyepiece (not the coarse/fine adjustment knobs).
5. Now looking through the left eyepiece with your left eye, focus the sample by turing the left diopter adjustment ring.
6. Repeat for all objectives, making small adjustments to the diopter rings until the image stays in focus using any objective.

BF/DF Light Path Selection

Slide the mirror selector lever (1) toward the indication of the mirror for the desired observation method.
1. BF: Reflected light Push for brightfield observation
2. DF: Reflected light Pull for darkfield observation

Be sure to slide the mirror selector lever until it contacts the stopper position.

Effects of Dummy Slider -The dummy slider (2) has been installed on the revolving nosepiece at the factory. It can be replaced by loosening the clamping knob (3) when a DIC prism is to be used. However, in observations other than DIC, be sure to push in the dummy slider in order for prevention of flare.

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Filters

There are two filter sliders (1) at the end of the illuminator. Two filters can be set on each filter slider. The desired filters can be brought into the optical path by sliding the filter sliders in and out.

Usable Filters	Applications
U-BP1100IRNCB11 (Band Pass Filterneutral color balancing filter)	Infrared
U-25LBD (Color temperature conversion filter)	Turns the illumination light into daylight. Used in general observations and color photography.
U-25IF550 (Green filter)	Enhanced contrast in monochrome observation. Used in monochrome photography
U-25Y48 (Yellow filter)	Contrast filter for observation of semiconductor wafers.
U-25ND50-2 (Light intensity adjustment filter)	Adjusts the brightness of the light source. (Transmittance: 50%)
U-25ND25-2 (Light intensity adjustment filter)	Adjusts the brightness of the light source. (Transmittance: 25%)
U-25ND6-2 (Light intensity adjustment filter)	Adjusts the brightness of the light source. (Transmittance: 6%)
U-25FR (Frost filter)	Reduces irregularity in the illumination field, but also reduces the brightness.
U-25L42 (UV cut filter)	Cuts ultraviolet rays. Used to prevent the polarizer from being burned by a high-intensity light source.

Color balance adjustment for general use and color photomicrography.
ND4 (transmission rate 25%)	Brightness adjustment
ND16 (transmission rate 6%)	Brightness adjustment
GIF (Green interference filter)	Contrast adjustment
IF	For interference

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Intensity Ratio Selector

Push or pull the intensity ratio selector (1) to select the desired light path.

Light Path Selector	Intensity RatioApplication
Pushed in	100% for binocular eyepieces	Observation of dark specimens
Middle position	20% for binocular eyepieces, 80% for TV/photographyObservation of bright specimens, photography, Tv observation
Pulled out	100% for TV/photography	Photography, TV observation

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Field Iris

The field iris is used to restrict the diameter of the beam of light entering the objective and thus excludes stray light from the observation path improving image contrast. The diameter of the field iris should be adjusted for each objective power to the extent that is just circumscribes the field of view.

The field iris

diaphragm knob

diaphragm slider (

2

1) and the field iris centering screw (

3

2) are used to adjust the field iris size and position in relation to the observation path.

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Aperture Iris

The aperture iris diaphragm determines the numerical aperture of the illumination system. Matching the numerical aperture of the illumination system with that of the objective provides better image resolution and contrast, and also increases the depth of focus.

The aperture iris

diaphragm knob

diaphragm slider (

2) and the aperture iris centering knob (3) are

1) is used to adjust the aperture iris size

and position

in relation to the observation path. Typically adjusted to 7-80% of the objective's exit pupil.

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Revolving Nosepiece

The revolving nosepiece allows the user to easily swap objective lenses into the observation path. Grasp the knurled ring and rotate the nosepiece clockwise or counterclockwise until you feel the detent snap into position.

If the objective is not located at a detent with objective installed, then the observation path will be blocked and the user will only see black.

Warning
Do not attempt to rotate the nosepiece by grasping the object lense assembly directly. This can damage the objective lense.

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Illumination Controls

Light Intensity Adjustment knob (1).
Light Intensity / Voltage Indicator (2).
1. For photomicrography the intensity should at approximately the level indicated by the camera symbol (Image Removed)
2. The numbers to the left indicate the approximate voltage of the light.
The light intensity preset switch (3) makes it possible to limit the light intensity to a preselected level regardless of the position of the brightness adjustment knob.
1. The light intensity preset switch has been preset before factory shipment to a position which can provide optimum color reproduction when the U-25LBD filter is engaged in the light path (approx. 9 V mark).
Using a small flat-blade screwdriver, the preset can be adjusted by turning the preset adjustment screw (4) to obtain the required light intensity. Turning the screw clockwise increases brightness.

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Focus Knob

Coarse adjustment knob
1. The larger knob is course stage adjustment and is used to quickly move the stage up and down for sample focusing.
Fine adjustment knob
1. The small knob farthest from the microscope base is the fine adjustment knob, and is used to move the stage vertically in small increments to facilitate fine focus of the sample.
Coarse adjustment knob tension adjustment.
1. Typically, the coarse adjustment knob tension is preadjusted for easy use.
2. If adjusted, turning in the direction of the arrow will increase tension and vise versa.
3. If the stage drops by itself when the knob is released, or the microscope quickly loses focus after adjustment the tension is set too low, rotate the ring in the direction of the arrow to correct.

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Coarse Focus Stopper

The coarse focus stopper restricts the movement of the coarse focus knob so the stage cannot be raised beyond the operators specified limit.

With the sample in focus, turn the coarse focus stopper ring as far as it will go in the direction of the arrow on the base of the microscope (about 3/4 revolution). The coarse focus stopper is now clamped in position. When changing the sample, lower the stage by turning only the coarse focus knob. After changing the sample, gently raise the stage by turning only the coarse focus knob as far as it will go. The sample should be roughly in focus when the stage has been raised as far as it will go. Use the fine focus knob to bring the sample into perfect focus.

Standard Operating Procedure

General Observation Procedure for Bright-field Reflected Mode Microscopy

Set the cube selector (1) to BF for bright field.

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Disengage the filter slider, analyzer slider, and polarizer slider (3) from the light path.

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Make sure light intensity preset button (3) is OFF.

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Press the main switch (

3

1) to "I" (ON)

and adjust the light intensity with the light intensity knob (1).

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Using the coarse focus adjustment knob (1), move the stage to the lowest position. Place sample on the stage.

Note: Be sure that the surface of the specimen to be observed is perpendicular to the optical axis of the microscope.

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Turn the revolving nosepiece to engage the 5X objective. While looking through the eyepiece, use the coarse focus adjustment knob to raise the stage and bring the sample into focus.

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Adjust interpupillary distance as necessary for clear binocular vision.

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Looking only through the right eyepiece with your right eye, use the fine adjustment knob to bring the sample into final focus.

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Looking only through the left eyepiece, use the diopter ring (1) to bring the left eyepiece into focus. This corrects the microscope observation paths for any differences between your left and right eye. You should now see a clear image through both lenses.

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Adjust the field iris as necessary to obtain appropriate illumination for the sample.

Pull out the field iris diaphragm knob (2) to reduce the diameter of the diaphragm.
If necessary, turn the centering screw (3) to adjust so that the image of the diaphragm is centered in the field of view.
To check center, push the field iris knob (2) in to increase the diameter of the diaphragm until it touches the periphery of the field of view. If the image is not centered, adjust as necessary.
Further enlarge the field iris diaphragm diameter until its image just circumscribes the field of view.

Reflected light bright field observation - To obtain good image contrast, adjust the diameter of the illuminating beam in accordance with the objective in use. Using the field iris diaphragm knob (2) on the vertical illuminator, adjust the diaphragm so that the field of view is circumscribed by the field iris diaphragm in order to exclude stray light.

Reflected light dark field observation - Always keep the field iris diaphragm knob (2) pushed in to leave the diaphragm open.

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Adjust the aperture iris as necessary to obtain appropriate illumination for the sample.

Remove the eyepieces to observe the diaphragm directly.
Looking through the eyepiece sleeves, pull out the aperture iris diaphragm knob (2) to leave the diaphragm approximately 70% open.
If necessary, center the diaphragm by manipulating the aperture iris diaphragm centering screw (3).

Reflected light bright field observation - In general, a good image is obtained if the diaphragm is reduced down to 70-80% of the objective's numerical aperture.

Reflected light dark field observation - Generally, you will always keep the aperture iris diaphragm knob (2) pushed in to leave the diaphragm open.

Note: Depending on the specimen, an image with good contrast and little flare may sometimes be obtained by keeping the aperture iris diaphragm stopped down a little more. Please experiment with this to see if it works with the particular specimen.

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Engage the filters suitable for your observation

Usable Filters

Applications

U-BP1100IR

(Band Pass Filter)

Infrared

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Configure the microscope for Bright-field microscopy Push the intensity ratio selector in to 100% binocular. Push in the Bright-field selector. Rotate the nosepiece to use the 10x objective. Lower the stage as far as it will go. Set the desired brightness of the illumination. Raise the levers to fully open the field diaphragm and the aperture diaphragm. Push in the NCB11 filter to compensate for color temperature. Install the ND filter to adjust the brightness.	Image Added
Place sample on the microscope stage, and bring it into focus while looking through the binocular eyepieces.	Image Added
Adjust the diopter. link to instructions above	Image Added
Adjust the interpupillary distance. link to instructions above	Image Added
Change the magnification and observe the sample. Select the desired magnification. Finely adjust the focus. Adjust the brightness. Adjust the field diaphragm to circumscribe the view field. Adjust the aperture diaphragm to 70-80% of the objective's Numerical Aperture. Adjust the brightness using the ND filter. Tip: When observing a sample with small contrast, such as the mirror-faced sample, it can be rather difficult to focus on it. In such a case, stop down the field diaphragm so that its image can be seen in the eyepieces. Now attempt to focus on the rim of the diaphragm image. When the rim is in focus, the sample will also be in focus.	Image Added
Dark-field Microscopy
Focus on the sample using bright-field microscopy techniques discussed above.
Configure the microscope for dark-field microscopy. Pull out the bright-field / dark-field slider. Adjust brightness. Adjust ND filters. Note: The field and aperture diaphragms are fully-opened automatically. However, the lever positions do not change. Return the microscope to bright-field microscopy Push in the bright-field / dark-field slider. Adjust Brightness. Adjust ND filters. Note: The field and aperture diaphragms automatically return to the status before the microscope was set to dark-field microscopy.	Image Added
Photomicrography
This microscope is equipped with a photomicrography tube and camera for observation and photography using the attached PC.