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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description


Estimated Fix Date and Comment

Responding Staff




iLab Name: Carbon Nanotube PECVD
iLab Kiosk:
FIC: Tim Fisher
Owner: Dave Lubelski
Location: BRK 2283
Maximum Wafer Size: 2"/50 mm


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Overview

General Description

Seki Techtron Diamond PECVD modified to grow carbon nanotubes.

Specifications

Limited access, see PI.

Technology

Overview - Remove if multiple tools use the same technology/process

Overview 

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References