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Overview

In addition to wet etching chemical hoods available inside and outside the Scifres clean room, there are many dry etching tools within the clean room for reactive ion etching (RIE), deep reactive ion etching (DRIE), asher, ion milling and vapor phase etch with a wide variety of chemistries available.

Staff Contact: Ron Reger



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Capabilities

Page Properties Report
firstcolumnTool Name
headingsType, Materials, Restricted Materials, Available Gases, Max RF Power, Wafer Size
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Tutorial on Etching