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- KLA-Tencor Alpha-Step IQ Surface Profiler – This stylus based system is a contact profiler which measures the differences in the surface topography
- Bruker Optical 3D Profilometer – A 3-dimensional non-contact optical profiler which utilizes white light interferometry to analyze the film surface.
- KLA-Tencor P7 Profilometer – A stylus profiler system capable of measuring step height, roughness and waviness of a surface of interest.
Staff Contact: Ron Reger
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