Title: Xactix E1 Xenon Difluoride (XeF2) Etcher  
Owner: Wirth, Justin C
Creator: Wirth, Justin C Nov 21, 2016
Last Changed by: Hosler, Richard S Jan 28, 2022
Tiny Link: (useful for email) https://purdue.atlassian.net/wiki/x/QQRf
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Time Editor  
Jan 28, 2022 10:17 Hosler, Richard S View Changes
Sept 04, 2020 17:58 Francis R Manfred View Changes
Sept 03, 2020 18:44 Samuel Peana (Unlicensed) View Changes
Sept 03, 2020 18:44 Samuel Peana (Unlicensed) View Changes
May 05, 2020 08:41 Former user  
Outgoing Links
External Links (10)
    https://docs.google.com/forms/d/e/1FAIpQLSex-jWtS1Qkldy563x…
    https://bircknano.freshdesk.com/support/home
    www-inst.eecs.berkeley.edu/~ee143/fa10/lab/XeF2_tutorial.pd…
    https://purdue.ilabsolutions.com/equipment/show/302370/?tab…
    mailto:fmanfred@purdue.edu
    https://docs.google.com/spreadsheets/d/1oRyvybfzqiKkVJ3e8Ju…
    https://purdue.ilabsolutions.com/service_centers/4141/equip…
    https://en.wikipedia.org/wiki/Polysilicon_halides
    https://wiki.itap.purdue.edu/pages/replycomment.action?comm…
    https://purdue.ilabsolutions.com/service_centers/4141/equip…
Birck Nanotechnology Center Wiki (4)     Page: Xenon Difluoride - Internal Resources
    Page: eLog - Xactix E1 Xenon Difluoride (XeF2) Etcher
    Page: Xactix E1 Xenon Difluoride (XeF2) Etcher
    Page: Problem Reporting Guide