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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment


Responding Staff


Gas is currently valved off (12/11/2024). If you need to use this tool please contact me 1 day prior.


Specialty furnace/RF power source combination.

SOP:

2D-CVD SOP (Aug 2020).pdf

iLabs Link:

H2S CVD Furnace



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