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CrossLab Name: Blue M Furnace
FIC:
Shared
Owner:
Dan Hosler
Location:
Cleanroom - P Bay
Maximum Wafer Size: 
2"/50 mm

Overview

General Description

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library


References

 

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