Skip to end of metadata
Go to start of metadata

You are viewing an old version of this content. View the current version.

Compare with Current View Version History

« Previous Version 6 Next »


iLab Name: Blue M Furnace
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Dan Hosler
Location: Cleanroom - P Bay
Maximum Wafer Size: 2"/50 mm

Overview

General Description

A table-top general purpose furnacefor inert and forming gas ambient conditions. Ramps to 1100C.

Specifications

  • Four process gases, N2, Ar, O2, and Forming Gas.
  • Capable of temperatures up to 1100°C (single temperature zone)
  • Samples lay horizontally on a quartz plate boat.
  • The quartz tube is 3" in diameter.

Sample Requirements and Preparation

 

Error rendering macro 'excerpt-include' : User 'null' does not have permission to view the page 'Nitrogen Anneal'.

 

Standard Operating Procedure



Questions & Troubleshooting


 

Process Library

References

 

  • No labels