CrossLab Name: Alpha-Step
FIC: Shared
Owner: Sean Rinehart
Location: Cleanroom - Bay L
Maximum Wafer Size: 8"/200 mm

Overview

General Description

The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.

Specifications

Accommodates up to 150mm (6") substrate and 21mm (0.83") thick. Measurement of vertical features ranging from 100A to approximately 2mm. The horizontal resolution limited by the stylus radius.

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting